Synthesis and Characterization of Amorphous Si2N2O

Remco van Weeren, Edgar A. Leone, Sean Curran, Lisa C. Klein, Stephen C. Danforth

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Amorphous silicon oxynitride powder was synthesized by nitridation of high‐purity silica in ammonia at 1120°C. The resulting material was X‐ray amorphous, and its chemical characteristics were determined by X‐ray photoelectron spectroscopy (XPS) and 29Si nuclear magnetic resonance (NMR). The XPS analysis showed a shift to lower binding energies for the Si2p peak with increasing nitrogen content. Upon initial nitridation, the full width at half maximum (FWHM) of the Si2p peak increased, but decreased again at higher nitrogen contents, thus showing the formation of a silicon oxynitride phase with a single or small range of composition. The 29Si NMR analysis showed the formation of (amorphous) Si3N4 (Si–N4) and possibly two oxynitride phases (Si–N3O, Si–N2O2). It is concluded that while XPS, FT‐IR, and nitrogen analysis may show the formation of an homogeneous, amorphous silicon oxynitride (Si2N2O) phase, the formation of phase–pure, amorphous Si2N2O is extremely difficult via this route.

Original languageEnglish (US)
Pages (from-to)2699-2702
Number of pages4
JournalJournal of the American Ceramic Society
Issue number10
StatePublished - Oct 1994

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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