Abstract
A class of optical storage media is described which consists of thin films, microscopically textured by reactive ion etching. These surfaces have random arrays of decoupled columns or cones with cross-sectional dimensions less than 100 nm. This structure yields a spatially varying, graded refractive index resulting in low specular reflectance for visible wavelengths. Reflective spots ~1 μm in diameter have been produced on the surfaces by local melting with a low power laser beam. This has been demonstrated for highly stable materials such as Si and Ge with threshold energies as low as ~1 nJ. The fabrication, microstructure, writing parameters and encapsulation of the media are discussed.
Original language | English (US) |
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Pages (from-to) | 202-205 |
Number of pages | 4 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 329 |
DOIs | |
State | Published - May 27 1982 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering