The mainstreaming of SOI

G. K. Celler, Andrew Wittkower, Christophe Maleville, Geoffrey Ryding, Peter Rose

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon-on-Insulator (SOI) technology has recently moved from niche applications into the mainstream of the IC industry. Circuits built on SOI substrates provide higher switching speed and/or reduced power consumption. As device dimensions are reduced into sub-50nm regime, proper device scaling will increasingly rely on SOI structures.

Original languageEnglish (US)
Title of host publication2002 14th International Conference on Ion Implantation Technology, IIT 2002 - Proceedings
EditorsBob Brown, Terry L. Alford, Mike Nastasi, Michael C. Vella
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages637-640
Number of pages4
ISBN (Electronic)0780371550
DOIs
StatePublished - Jan 1 2002
Externally publishedYes
Event2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 - Taos, United States
Duration: Sep 22 2002Sep 27 2002

Publication series

NameProceedings of the International Conference on Ion Implantation Technology
Volume22-27-September-2002

Other

Other2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002
CountryUnited States
CityTaos
Period9/22/029/27/02

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Keywords

  • SOI
  • Silicon-on-Insulator
  • Smart Cut™
  • layer transfer
  • silicon wafers

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  • Cite this

    Celler, G. K., Wittkower, A., Maleville, C., Ryding, G., & Rose, P. (2002). The mainstreaming of SOI. In B. Brown, T. L. Alford, M. Nastasi, & M. C. Vella (Eds.), 2002 14th International Conference on Ion Implantation Technology, IIT 2002 - Proceedings (pp. 637-640). [1258086] (Proceedings of the International Conference on Ion Implantation Technology; Vol. 22-27-September-2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IIT.2002.1258086