The realization and characterization of hard cubic Zr3N 4 (c-Zr3N4) thin films were discussed. The films, deposited using a novel but industrially viable modified filtered cathodic arc (FCA) method, undergo a phase transformation from orthorhombic to cubic above a critical stress level of 9 GPa as determined by X-ray diffraction and Raman spectroscopy. The c-Zr3N4 films were significantly harder (∼36 GPa) than both the orthorhombic Zr 3N4 and ZrN films (∼27 GPa). It was shown that the ability to deposit this material onto components as a thin film is expected to allow its use in wear- and oxidation-resistant applications.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering