Thin PSG process for 4H-SiC MOSFET

Y. K. Sharma, A. C. Ahyi, T. Issacs-Smith, A. Modic, Y. Xu, E. Garfunkel, M. R. Jennings, C. Fisher, S. M. Thomas, P. Mawby, S. Dhar, L. C. Feldman, J. R. Williams

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


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