Time- and space-resolved electron-impact excitation rates in an rf glow discharge

M. J. Colgan, N. Kwon, Y. Li, D. E. Murnick

Research output: Contribution to journalArticle

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Electron-impact excitation rates in a capacitively coupled 13.6-MHz rf argon discharge were derived from optical emission measurements with high time and space resolution. A propagating excitation wave form is shown to exist at gas pressures as high as 1.0 Torr. The observed featuresincluding temporal broadening of the wave formare in agreement with recent simulation results, and can explain apparent transitions in electron energy distributions previously reported.

Original languageEnglish (US)
Pages (from-to)1858-1861
Number of pages4
JournalPhysical review letters
Issue number14
StatePublished - Jan 1 1991


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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