Electron-impact excitation rates in a capacitively coupled 13.6-MHz rf argon discharge were derived from optical emission measurements with high time and space resolution. A propagating excitation wave form is shown to exist at gas pressures as high as 1.0 Torr. The observed featuresincluding temporal broadening of the wave formare in agreement with recent simulation results, and can explain apparent transitions in electron energy distributions previously reported.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)