Time- and space-resolved electron-impact excitation rates in an rf glow discharge

M. J. Colgan, N. Kwon, Y. Li, D. E. Murnick

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Abstract

Electron-impact excitation rates in a capacitively coupled 13.6-MHz rf argon discharge were derived from optical emission measurements with high time and space resolution. A propagating excitation wave form is shown to exist at gas pressures as high as 1.0 Torr. The observed featuresincluding temporal broadening of the wave formare in agreement with recent simulation results, and can explain apparent transitions in electron energy distributions previously reported.

Original languageEnglish (US)
Pages (from-to)1858-1861
Number of pages4
JournalPhysical review letters
Volume66
Issue number14
DOIs
StatePublished - Jan 1 1991

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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