Abstract
A monochromator we have introduced is improving the attainable energy resolution of electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) by more than 2x relative to what has been available until recently. Here we briefly review the design and the performance attained so far. We then investigate the ultimate resolution limits of our system and show that it should be able to reach an energy resolution of <10 meV.
Original language | English (US) |
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Article number | 012023 |
Journal | Journal of Physics: Conference Series |
Volume | 522 |
Issue number | 1 |
DOIs | |
State | Published - 2014 |
Event | Electron Microscopy and Analysis Group Conference 2013, EMAG 2013 - York, United Kingdom Duration: Sep 3 2013 → Sep 6 2013 |
All Science Journal Classification (ASJC) codes
- General Physics and Astronomy