Towards sub-10 meV energy resolution STEM-EELS

Ondrej L. Krivanek, Tracy C. Lovejoy, Matthew F. Murfitt, Gwyn Skone, Philip E. Batson, Niklas Dellby

Research output: Contribution to journalConference articlepeer-review

37 Scopus citations

Abstract

A monochromator we have introduced is improving the attainable energy resolution of electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) by more than 2x relative to what has been available until recently. Here we briefly review the design and the performance attained so far. We then investigate the ultimate resolution limits of our system and show that it should be able to reach an energy resolution of <10 meV.

Original languageEnglish (US)
Article number012023
JournalJournal of Physics: Conference Series
Volume522
Issue number1
DOIs
StatePublished - 2014
EventElectron Microscopy and Analysis Group Conference 2013, EMAG 2013 - York, United Kingdom
Duration: Sep 3 2013Sep 6 2013

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy

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