TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY METALS.

P. GRABBE; E. L. HU; R. E. HOWARD

doi:10.1116/1.571731

TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY METALS.

P. GRABBE, E. L. HU, R. E. HOWARD

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A TRILEVEL LIFT-OFF PROCESS IS DESCRIBED THAT INCORPORATES A HIGH-GLASS-TEMPERATURE POLYMER, POLYIMIDE. THIS PROCESS ALLOWS THE HIGH RESOLUTION PATTERNING OF REFRACTORY MATERIALS AT ELEVATED SUBSTRATE TEMPERATURES ( > 200 D. C). IT HAS BEEN SUCCESSFULLY USED TO PRODUCE PATTERNED SUPERCONDUCTING NIOBIUM FILMS WHOSE CRITICAL TEMPERATURES SUFFERED NO DEGRADATION COMPARED TO SIMULTANEOUSLY EVAPORATED, UNPATTERNED FILMS.

Original language	English (US)
Pages (from-to)	33-35
Number of pages	3
Journal	J VAC SCI TECHNOL
Volume	V 21
Issue number	N 1
DOIs	https://doi.org/10.1116/1.571731
State	Published - 1982
Externally published	Yes

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1116/1.571731

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title = "TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY METALS.",

abstract = "A TRILEVEL LIFT-OFF PROCESS IS DESCRIBED THAT INCORPORATES A HIGH-GLASS-TEMPERATURE POLYMER, POLYIMIDE. THIS PROCESS ALLOWS THE HIGH RESOLUTION PATTERNING OF REFRACTORY MATERIALS AT ELEVATED SUBSTRATE TEMPERATURES ( > 200 D. C). IT HAS BEEN SUCCESSFULLY USED TO PRODUCE PATTERNED SUPERCONDUCTING NIOBIUM FILMS WHOSE CRITICAL TEMPERATURES SUFFERED NO DEGRADATION COMPARED TO SIMULTANEOUSLY EVAPORATED, UNPATTERNED FILMS.",

author = "P. GRABBE and HU, {E. L.} and HOWARD, {R. E.}",

year = "1982",

doi = "10.1116/1.571731",

language = "English (US)",

volume = "V 21",

pages = "33--35",

journal = "J VAC SCI TECHNOL",

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T1 - TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY METALS.

AU - GRABBE, P.

AU - HU, E. L.

AU - HOWARD, R. E.

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AB - A TRILEVEL LIFT-OFF PROCESS IS DESCRIBED THAT INCORPORATES A HIGH-GLASS-TEMPERATURE POLYMER, POLYIMIDE. THIS PROCESS ALLOWS THE HIGH RESOLUTION PATTERNING OF REFRACTORY MATERIALS AT ELEVATED SUBSTRATE TEMPERATURES ( > 200 D. C). IT HAS BEEN SUCCESSFULLY USED TO PRODUCE PATTERNED SUPERCONDUCTING NIOBIUM FILMS WHOSE CRITICAL TEMPERATURES SUFFERED NO DEGRADATION COMPARED TO SIMULTANEOUSLY EVAPORATED, UNPATTERNED FILMS.

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JF - J VAC SCI TECHNOL

IS - N 1

ER -

TRILEVEL LIFT-OFF PROCESS FOR REFRACTORY METALS.

Abstract

All Science Journal Classification (ASJC) codes

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