UHF quartz MEMS oscillators for dynamics-based system enhancements

R. L. Kubena, D. J. Kirby, Yook-Kong Yong, D. T. Chang, F. P. Stratton, H. D. Nguyen, R. J. Joyce, R. Perahia, H. P. Moyer, R. G. Nagele

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Processes for fabricating full wafers of UHF quartz MEMS oscillators bonded to Si have been developed at HRL over the past several years. These devices have shown state-of-the-art noise and stability along with extremely small vacuum packaged die size of less than 3 mm. An interesting by-product of the high frequency, small size, and wafer-scale fabrication of these devices is that several novel dynamics-based enhancements can be considered. These include the use of nonlinear dynamics for reducing oscillator phase noise at CMOS capable voltages and co-integration with more complex structures for sensing vibration and serving as a local timing reference for reducing thermally-induced sensor drifts. Several of these novel concepts made possible by wafer-scale MEMS-based processing will be reviewed.

Original languageEnglish (US)
Title of host publication2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Pages1-8
Number of pages8
DOIs
StatePublished - Dec 1 2013
Event2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 - Prague, Czech Republic
Duration: Jul 21 2013Jul 25 2013

Publication series

Name2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Other

Other2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
CountryCzech Republic
CityPrague
Period7/21/137/25/13

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Keywords

  • Quartz MEMS
  • Si Disk Resonator Gyro
  • duffing
  • force rebalance
  • frequency locking
  • nonlinear operation
  • ovenization
  • phase noise
  • vibration compensation

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  • Cite this

    Kubena, R. L., Kirby, D. J., Yong, Y-K., Chang, D. T., Stratton, F. P., Nguyen, H. D., Joyce, R. J., Perahia, R., Moyer, H. P., & Nagele, R. G. (2013). UHF quartz MEMS oscillators for dynamics-based system enhancements. In 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 (pp. 1-8). [6702066] (2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013). https://doi.org/10.1109/EFTF-IFC.2013.6702066