A voltage tunable surface acoustic wave phase shifter is made of a ZnO based semiconducting/ piezoelectric dual-layer structure on an r-Al 2O 3 substrate by using a hybrid growth technology. Piezoelectric and semiconducting ZnO layers are used for acoustic wave excitation and n-type conducting channel, while SiO 2 serves as the gate insulator. The acoustic velocity of the device is tuned by changing the n-channel conductance with a dc bias. The in-plane anisotropy of the piezoelectric ZnO/r-Al 2O 3 structure enables multimode operations. Sezawa and Love wave modes are used to get high effective coupling coefficients, which result in large phase shifts.
|Original language||English (US)|
|Journal||Applied Physics Letters|
|State||Published - 2006|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)